Low-temperature, plasma assisted, cyclic synthesis of MoS2
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چکیده
منابع مشابه
Low-temperature synthesis of graphene on Cu using plasma-assisted thermal chemical vapor deposition
Plasma-assisted thermal chemical vapor deposition (CVD) was carried out to synthesize high-quality graphene film at a low temperature of 600°C. Monolayer graphene films were thus synthesized on Cu foil using various ratios of hydrogen and methane in a gaseous mixture. The in situ plasma emission spectrum was measured to elucidate the mechanism of graphene growth in a plasma-assisted thermal CVD...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2018
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.5023202